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Microsystems & Microstructures MEMS/NEMS

Micro- and nanoelectromechanical systems (MEMS/NEMS) and, more general, microsystems have become indispensable for many of today’s electronic systems. Fabricated using processes adapted from the integrated circuit industry, MEMS/NEMS have applications ranging from automotive to defense industries, and from biomedical to consumer electronic devices.

At Georgia Tech, faculty members from across the College of Engineering utilize IEN’s cleanroom facilities to explore new materials, new fabrication processes, new device concepts, and new integrated microsystems. Faculty groups work with traditional silicon technology, but also explore novel materials and processes based on metals, ceramics and polymers. In the biomedical field, GT faculty develop e.g. biodegradable MEMS devices, catheter-based imaging arrays for intravascular ultrasound imaging, microneedle patches for vaccinations and implantable microsystems for cochlear and vestibular prosthesis. Research on micro- and nanomachined sensors ranges from accelerometers and gyroscopes for inertial navigation systems to biochemical sensors for environmental sensing and medical diagnostics. Ongoing RF MEMS research includes high-frequency resonators for timing applications, integrated passives, and reconfigurable filters and antennas. In the area of Power MEMS, research at GT targets microgenerators, energy storage devices, and energy harvesters.

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